Thin Films Technology: Practical Manual for the Laboratory Works (Hardcover) (ISBN-13: 9789811246326)

This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.

Author: Alexander Axelevitch
ISBN-10: 9811246327
ISBN-13: 9789811246326
Publisher: World Scientific Publishing Company
Language: English
Published: 12/20/2021
Pages: 236
Format: Hardcover
Weight: 1.07lbs
Size: 9.00h x 6.00w x 0.56d