Topics in Growth and Device Processing of III-V Semiconductors (Hardcover) (ISBN-13: 9789810218843)

This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices. These devices are used in many applications such as cordless telephones and high speed lightwave communication systems.

Author: Cammy R. Abernathy,Chih Tang Sah,F. Ren
ISBN-10: 9810218842
ISBN-13: 9789810218843
Publisher: World Scientific Publishing Company
Language: English
Published: 11/09/1996
Pages: 560
Format: Hardcover
Weight: 1.80lbs
Size: 8.90h x 6.20w x 1.30d