Tomasz Brozek

Micro- and Nanoelectronics: Emerging Device Challenges and Solutions presents a comprehensive overview of the current state of the art of micro- and nanoelectronics, covering the field from fundamental science and material properties to novel ways of making nanodevices. Containing contributions from experts in both...

Presenting a comprehensive overview of the state of the art of micro- and nanoelectronics, this book covers the field from fundamental science and material properties to novel ways of making nanodevices. It explores silicon compounds and processes; discusses FD SOI devices and candidates for...